| 시설장비 설명 |
MProbe: thin film measurement system Small affordable and reliable MProbe is a spectral reflectometer/transmittance system that can measure practically any translucent films in 3nm -800 um range. There are several MProbe models with total spectral range from 200nm to 5000nm. Measurements can be done on desktop insitu (UHV etc) inline small or big spot mapping with motorized XY stage and other options are available. It is well suited for R&D and production measurements. One-click measurement process is smooth and transparent to the user. TFCompanion software is integrated in MProbe system and controls both data acquisition and data analysis It is easy to be a measurement expert with MProbe( read more..) TFCompanion: data analysis software. TFCompanion software is a de facto standard for thin-film data analysis for ellipsometry reflectance and transmittance measurements.Single point measurement batch mapping data imaging data are supported. Researchers and engineers from around the world relying of our soft |
